Replacing libraries in scatterometry
Research output: Contribution to journal › Journal article › Research › peer-review
Standard
Replacing libraries in scatterometry. / Madsen, Jonas Skovlund Moller; Jensen, Soren Alkaersig; Nygard, Jesper; Hansen, Poul Erik.
In: Optics Express, Vol. 26, No. 26, 24.12.2018, p. 34622-34632.Research output: Contribution to journal › Journal article › Research › peer-review
Harvard
Madsen, JSM, Jensen, SA, Nygard, J & Hansen, PE 2018, 'Replacing libraries in scatterometry', Optics Express, vol. 26, no. 26, pp. 34622-34632. https://doi.org/10.1364/OE.26.034622
APA
Madsen, J. S. M., Jensen, S. A., Nygard, J., & Hansen, P. E. (2018). Replacing libraries in scatterometry. Optics Express, 26(26), 34622-34632. https://doi.org/10.1364/OE.26.034622
Vancouver
Madsen JSM, Jensen SA, Nygard J, Hansen PE. Replacing libraries in scatterometry. Optics Express. 2018 Dec 24;26(26):34622-34632. https://doi.org/10.1364/OE.26.034622
Author
Bibtex
@article{82206f3267b04ebb9077e6d0837d0896,
title = "Replacing libraries in scatterometry",
author = "Madsen, {Jonas Skovlund Moller} and Jensen, {Soren Alkaersig} and Jesper Nygard and Hansen, {Poul Erik}",
note = "[Qdev]",
year = "2018",
month = dec,
day = "24",
doi = "10.1364/OE.26.034622",
language = "English",
volume = "26",
pages = "34622--34632",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "26",
}
RIS
TY - JOUR
T1 - Replacing libraries in scatterometry
AU - Madsen, Jonas Skovlund Moller
AU - Jensen, Soren Alkaersig
AU - Nygard, Jesper
AU - Hansen, Poul Erik
N1 - [Qdev]
PY - 2018/12/24
Y1 - 2018/12/24
U2 - 10.1364/OE.26.034622
DO - 10.1364/OE.26.034622
M3 - Journal article
C2 - 30650883
VL - 26
SP - 34622
EP - 34632
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 26
ER -
ID: 211164403