Scatterometry for optimization of injection molded nanostructures at the fabrication line
Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Journal | International Journal of Advanced Manufacturing Technology |
| Volume | 99 |
| Issue number | 9-12, SI |
| Pages (from-to) | 2669-2676 |
| Number of pages | 8 |
| ISSN | 0268-3768 |
| DOIs | |
| Publication status | Published - 1 Dec 2018 |
Bibliographical note
[Qdev]
- Scatterometry, Injection molding, Nanostructures, Metrology, Process control
Research areas
ID: 210112796