Standard
Scatterometry for optimization of injection molded nanostructures at the fabrication line. / Madsen, Jonas Skovlund; Jensen, Soren Alkaersig; Nakotte, Lars; Vogelsang, Arne; Thamdrup, Lasse Hojlund; Czolkos, Ilja; Johansson, Alicia; Garnaes, Jorgen; Nielsen, Theodor; Nygard, Jesper; Hansen, Poul Erik.
In:
International Journal of Advanced Manufacturing Technology, Vol. 99, No. 9-12, SI, 01.12.2018, p. 2669-2676.
Research output: Contribution to journal › Journal article › Research › peer-review
Harvard
Madsen, JS, Jensen, SA, Nakotte, L, Vogelsang, A, Thamdrup, LH, Czolkos, I, Johansson, A, Garnaes, J, Nielsen, T
, Nygard, J & Hansen, PE 2018, '
Scatterometry for optimization of injection molded nanostructures at the fabrication line',
International Journal of Advanced Manufacturing Technology, vol. 99, no. 9-12, SI, pp. 2669-2676.
https://doi.org/10.1007/s00170-018-2665-7APA
Madsen, J. S., Jensen, S. A., Nakotte, L., Vogelsang, A., Thamdrup, L. H., Czolkos, I., Johansson, A., Garnaes, J., Nielsen, T.
, Nygard, J., & Hansen, P. E. (2018).
Scatterometry for optimization of injection molded nanostructures at the fabrication line.
International Journal of Advanced Manufacturing Technology,
99(9-12, SI), 2669-2676.
https://doi.org/10.1007/s00170-018-2665-7Vancouver
Madsen JS, Jensen SA, Nakotte L, Vogelsang A, Thamdrup LH, Czolkos I et al.
Scatterometry for optimization of injection molded nanostructures at the fabrication line.
International Journal of Advanced Manufacturing Technology. 2018 Dec 1;99(9-12, SI):2669-2676.
https://doi.org/10.1007/s00170-018-2665-7Author
Madsen, Jonas Skovlund ; Jensen, Soren Alkaersig ; Nakotte, Lars ; Vogelsang, Arne ; Thamdrup, Lasse Hojlund ; Czolkos, Ilja ; Johansson, Alicia ; Garnaes, Jorgen ; Nielsen, Theodor ; Nygard, Jesper ; Hansen, Poul Erik. / Scatterometry for optimization of injection molded nanostructures at the fabrication line. In: International Journal of Advanced Manufacturing Technology. 2018 ; Vol. 99, No. 9-12, SI. pp. 2669-2676.
Bibtex
@article{ef00cf63e72144f5b9c6b9a396d80329,
title = "Scatterometry for optimization of injection molded nanostructures at the fabrication line",
keywords = "Scatterometry, Injection molding, Nanostructures, Metrology, Process control",
author = "Madsen, {Jonas Skovlund} and Jensen, {Soren Alkaersig} and Lars Nakotte and Arne Vogelsang and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Alicia Johansson and Jorgen Garnaes and Theodor Nielsen and Jesper Nygard and Hansen, {Poul Erik}",
note = "[Qdev]",
year = "2018",
month = dec,
day = "1",
doi = "10.1007/s00170-018-2665-7",
language = "English",
volume = "99",
pages = "2669--2676",
journal = "International Journal of Advanced Manufacturing Technology",
issn = "0268-3768",
publisher = "Springer",
number = "9-12, SI",
}
RIS
TY - JOUR
T1 - Scatterometry for optimization of injection molded nanostructures at the fabrication line
AU - Madsen, Jonas Skovlund
AU - Jensen, Soren Alkaersig
AU - Nakotte, Lars
AU - Vogelsang, Arne
AU - Thamdrup, Lasse Hojlund
AU - Czolkos, Ilja
AU - Johansson, Alicia
AU - Garnaes, Jorgen
AU - Nielsen, Theodor
AU - Nygard, Jesper
AU - Hansen, Poul Erik
N1 - [Qdev]
PY - 2018/12/1
Y1 - 2018/12/1
KW - Scatterometry
KW - Injection molding
KW - Nanostructures
KW - Metrology
KW - Process control
U2 - 10.1007/s00170-018-2665-7
DO - 10.1007/s00170-018-2665-7
M3 - Journal article
VL - 99
SP - 2669
EP - 2676
JO - International Journal of Advanced Manufacturing Technology
JF - International Journal of Advanced Manufacturing Technology
SN - 0268-3768
IS - 9-12, SI
ER -
