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Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry. / Madsen, Jonas Skovlund; Hansen, Poul Erik; Boher, Pierre; Dwarakanath, B. S.; Jørgensen, Jan Friis; Bilenberg, Brian; Nygård, Jesper; Madsen, Morten Hannibal.
I:
Journal of Micro and Nano-Manufacturing, Bind 5, Nr. 3, 031005, 07.06.2017.
Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › fagfællebedømt
Harvard
Madsen, JS, Hansen, PE, Boher, P, Dwarakanath, BS, Jørgensen, JF, Bilenberg, B
, Nygård, J & Madsen, MH 2017, '
Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry',
Journal of Micro and Nano-Manufacturing, bind 5, nr. 3, 031005.
https://doi.org/10.1115/1.4036889APA
Madsen, J. S., Hansen, P. E., Boher, P., Dwarakanath, B. S., Jørgensen, J. F., Bilenberg, B.
, Nygård, J., & Madsen, M. H. (2017).
Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry.
Journal of Micro and Nano-Manufacturing,
5(3), [031005].
https://doi.org/10.1115/1.4036889Vancouver
Madsen JS, Hansen PE, Boher P, Dwarakanath BS, Jørgensen JF, Bilenberg B o.a.
Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry.
Journal of Micro and Nano-Manufacturing. 2017 jun. 7;5(3). 031005.
https://doi.org/10.1115/1.4036889Author
Madsen, Jonas Skovlund ; Hansen, Poul Erik ; Boher, Pierre ; Dwarakanath, B. S. ; Jørgensen, Jan Friis ; Bilenberg, Brian ; Nygård, Jesper ; Madsen, Morten Hannibal. / Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry. I: Journal of Micro and Nano-Manufacturing. 2017 ; Bind 5, Nr. 3.
Bibtex
@article{cdf92f38a5dd4e3f95f6293c3933d577,
title = "Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry",
author = "Madsen, {Jonas Skovlund} and Hansen, {Poul Erik} and Pierre Boher and Dwarakanath, {B. S.} and J{\o}rgensen, {Jan Friis} and Brian Bilenberg and Jesper Nyg{\aa}rd and Madsen, {Morten Hannibal}",
note = "[Qdev]",
year = "2017",
month = jun,
day = "7",
doi = "10.1115/1.4036889",
language = "English",
volume = "5",
journal = "Journal of Micro and Nano-Manufacturing",
issn = "2166-0468",
publisher = "The American Society of Mechanical Engineers",
number = "3",
}
RIS
TY - JOUR
T1 - Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
AU - Madsen, Jonas Skovlund
AU - Hansen, Poul Erik
AU - Boher, Pierre
AU - Dwarakanath, B. S.
AU - Jørgensen, Jan Friis
AU - Bilenberg, Brian
AU - Nygård, Jesper
AU - Madsen, Morten Hannibal
N1 - [Qdev]
PY - 2017/6/7
Y1 - 2017/6/7
U2 - 10.1115/1.4036889
DO - 10.1115/1.4036889
M3 - Journal article
VL - 5
JO - Journal of Micro and Nano-Manufacturing
JF - Journal of Micro and Nano-Manufacturing
SN - 2166-0468
IS - 3
M1 - 031005
ER -
