Standard
In-line characterization of nanostructured mass-produced polymer components using scatterometry. / Madsen, Jonas Skovlund; Thamdrup, Lasse Hojlund; Czolkos, Ilja; Hansen, Poul Erik; Johansson, Alicia; Garnaes, Jorgen; Nygard, Jesper; Madsen, Morten Hannibal.
I:
Journal of Micromechanics and Microengineering, Bind 27, Nr. 8, 085004, 20.07.2017.
Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › fagfællebedømt
Harvard
Madsen, JS, Thamdrup, LH, Czolkos, I, Hansen, PE, Johansson, A, Garnaes, J
, Nygard, J & Madsen, MH 2017, '
In-line characterization of nanostructured mass-produced polymer components using scatterometry',
Journal of Micromechanics and Microengineering, bind 27, nr. 8, 085004.
https://doi.org/10.1088/1361-6439/aa7a3aAPA
Madsen, J. S., Thamdrup, L. H., Czolkos, I., Hansen, P. E., Johansson, A., Garnaes, J.
, Nygard, J., & Madsen, M. H. (2017).
In-line characterization of nanostructured mass-produced polymer components using scatterometry.
Journal of Micromechanics and Microengineering,
27(8), [085004].
https://doi.org/10.1088/1361-6439/aa7a3aVancouver
Madsen JS, Thamdrup LH, Czolkos I, Hansen PE, Johansson A, Garnaes J o.a.
In-line characterization of nanostructured mass-produced polymer components using scatterometry.
Journal of Micromechanics and Microengineering. 2017 jul. 20;27(8). 085004.
https://doi.org/10.1088/1361-6439/aa7a3aAuthor
Madsen, Jonas Skovlund ; Thamdrup, Lasse Hojlund ; Czolkos, Ilja ; Hansen, Poul Erik ; Johansson, Alicia ; Garnaes, Jorgen ; Nygard, Jesper ; Madsen, Morten Hannibal. / In-line characterization of nanostructured mass-produced polymer components using scatterometry. I: Journal of Micromechanics and Microengineering. 2017 ; Bind 27, Nr. 8.
Bibtex
@article{9ff417ba22dc4a2ab124c15000db70b0,
title = "In-line characterization of nanostructured mass-produced polymer components using scatterometry",
keywords = "scatterometry, injection molding, metrology, in-line characterization",
author = "Madsen, {Jonas Skovlund} and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Hansen, {Poul Erik} and Alicia Johansson and Jorgen Garnaes and Jesper Nygard and Madsen, {Morten Hannibal}",
note = "[Qdev]",
year = "2017",
month = jul,
day = "20",
doi = "10.1088/1361-6439/aa7a3a",
language = "English",
volume = "27",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics Publishing Ltd",
number = "8",
}
RIS
TY - JOUR
T1 - In-line characterization of nanostructured mass-produced polymer components using scatterometry
AU - Madsen, Jonas Skovlund
AU - Thamdrup, Lasse Hojlund
AU - Czolkos, Ilja
AU - Hansen, Poul Erik
AU - Johansson, Alicia
AU - Garnaes, Jorgen
AU - Nygard, Jesper
AU - Madsen, Morten Hannibal
N1 - [Qdev]
PY - 2017/7/20
Y1 - 2017/7/20
KW - scatterometry
KW - injection molding
KW - metrology
KW - in-line characterization
U2 - 10.1088/1361-6439/aa7a3a
DO - 10.1088/1361-6439/aa7a3a
M3 - Journal article
VL - 27
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 8
M1 - 085004
ER -
