Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics - Staff at the Niels Bohr Institute

Niels Bohr Institute

Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics

Research output: Contribution to journal › Journal article › Research › peer-review

Midolo, Leonardo
T. Pregnolato
G. Kirsanske
S. Stobbe

Original language	English
Article number	484002
Journal	Nanotechnology
Volume	26
Issue number	48
ISSN	0957-4484
DOIs	https://doi.org/10.1088/0957-4484/26/48/484002
Publication status	Published - 4 Dec 2015

Research areas

nanofabrication, plasma etching, photonic crystals, III-V semiconconductors, quantum photonics, integrated optical circuits

ID: 153371559