In-line characterization of nanostructured mass-produced polymer components using scatterometry

Research output: Contribution to journal › Journal article › Research › peer-review

  • Jonas Skovlund Madsen
  • Lasse Hojlund Thamdrup
  • Ilja Czolkos
  • Poul Erik Hansen
  • Alicia Johansson
  • Jorgen Garnaes
  • Nygård, Jesper
  • Morten Hannibal Madsen
Original languageEnglish
Article number085004
JournalJournal of Micromechanics and Microengineering
Volume27
Issue number8
Number of pages8
ISSN0960-1317
DOIs
Publication statusPublished - 20 Jul 2017

Bibliographical note

[Qdev]

    Research areas

  • scatterometry, injection molding, metrology, in-line characterization

ID: 186155187