Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Article number | 171606 |
| Journal | Applied Physics Letters |
| Volume | 112 |
| Issue number | 17 |
| Number of pages | 6 |
| ISSN | 0003-6951 |
| DOIs | |
| Publication status | Published - 23 Apr 2018 |
Bibliographical note
[Qdev]
ID: 196375063