Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry

Research output: Contribution to journal › Journal article › Research › peer-review

  • Jonas Skovlund Madsen
  • Poul Erik Hansen
  • Pierre Boher
  • B. S. Dwarakanath
  • Jan Friis Jørgensen
  • Brian Bilenberg
  • Nygård, Jesper
  • Morten Hannibal Madsen
Original languageEnglish
Article number031005
JournalJournal of Micro and Nano-Manufacturing
Volume5
Issue number3
ISSN2166-0468
DOIs
Publication statusPublished - 7 Jun 2017

Bibliographical note

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ID: 186122983