Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride resonators

Research output: Contribution to journalJournal articlepeer-review

Original languageEnglish
Article number181106
JournalApplied Physics Letters
Volume110
Issue number18
ISSN0003-6951
DOIs
Publication statusPublished - 1 May 2017

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ID: 182225071