Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
---|---|
Article number | 171606 |
Journal | Applied Physics Letters |
Volume | 112 |
Issue number | 17 |
Number of pages | 6 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 23 Apr 2018 |
Bibliographical note
[Qdev]
ID: 196375063